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NanoCalc 反射膜厚测量系统
NanoCalc Thin Film Reflectometry System
商品货号：ECS001283
商品品牌：ocean optics
PDF 文档： DownloadNanoCalc 反射膜厚测量系统details Document
详细介绍

薄膜的光学特性一般基于反射和干涉。NanoCalc薄膜反射测量系统可以分析10nm -250um的膜厚。对单层膜的分辨率可达0.1nm。通过测量软件不同设置，用户可以在1秒钟内分析单层或最多达到10层的膜厚。可测试的薄膜种类有半导体工艺薄膜、防划伤膜、硬膜以及增透膜等。

 膜厚测量

 

产品特点

  • 可分析单层或多层薄膜；
  • 分辨率达0.1nm；
  • 适合于在线监测；

 

使用原理

最常用的两种测量薄膜的特性的方法为反射/透射测量，椭偏测量。NanoCalc利用反射原理，通过测量宽光谱范围内的反射率曲线来进行膜厚测量。

 

查找n和k值

可以进行多达十层的薄膜测量，薄膜和基体材质可以是金属、电介质、无定形材料或硅晶等。NanoCalc软件包含了大多数材料的n和k值数据库，用户也可以自己添加和编辑。

   膜厚测量

 

应用

NanoCalc薄膜反射材料系统适合于在线膜厚测量，包括氧化层、中氮化硅薄膜、感光胶片及其它类型的薄膜。NanoCalc也可测量在钢、铝、铜、陶瓷、塑料等物质上的抗反射涂层、抗磨涂层等。

 

NanoCalc Systems Available

NANOCALC-2000-UV-VIS-NIR

Wavelength:

250-1100 nm

Thickness:

10 nm-70 um

Light source:

Deuterium and Tungsten Halogen

 

NANOCALC-2000-UV-VIS

Wavelength:

250-850 nm

Thickness:

10 nm-20 um

Light source:

Deuterium and Tungsten Halogen

 

NANOCALC-2000-VIS-NIR

Wavelength:

400-1100 nm

Thickness:

20 nm-10 um (optional 1 um-250 um)

Light source:

Tungsten Halogen

 

NANOCALC-2000-VIS

Wavelength:

400-850 nm

Thickness:

50 nm-20 um

Light source:

Tungsten Halogen

 

NANOCALC-2000-NIR

Wavelength:

650-1100 nm

Thickness:

70 nm-70 um

Light source:

Tungsten Halogen

 

NANOCALC-2000-NIR-HR

Wavelength:

650-1100 nm

Thickness:

70 nm-70 um

Light source:

Tungsten Halogen

 

NANOCALC-2000-512-NIR

Wavelength:

900-1700 nm

Thickness:

50 nm-200 um

Light source:

High-power Tungsten Halogen

For Reflectometry applications, the following items are required:

NC-2UV-VIS100-2

Bifurcated UV fiber
400 um x 2m
2x SMA connectors
Flexible metal jacketing

NC-STATE

Single point reflection measurement for non transparent samples
Step-Wafer 5 Steps 0-500 mm, calibrated 4"

If using a microscope, the following items are also needed:

NC-7UV-VIS200-2

Reflection probe for application microscopy with MFA-C-Mount
Step-Wafer 5 Steps 0-500 mm, calibrated 4"

NanoCalc Specifications

Angle of incidence:

90°

Number of layers:

3 or fewer

Reference measurement needed:

Yes (bare substrate)

Transparent materials:

Yes

Transmission mode:

Yes

Rough materials:

Yes

Measurement speed:

100 milliseconds to 1 second

On-line possibilities:

Yes

Mechanical tolerance (height):

With new reference or collimation (74-UV)

Mechanical tolerance (angle):

Yes, with new reference

Microspot option:

Yes, with microscope

Vision option:

Yes, with microscope

Mapping option:

6" and 12" XYZ mapping tables

Vacuum possibilities:

Yes
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