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SpecEl椭偏仪details Document
SpecEl-2000椭偏仪通过测量从样品表面反射回来的偏振光，获得以波长为自变量的膜层厚度以及折射率函数。SpecEl-2000由计算机控制，可以测量多层结构的膜层厚度以及折射率函数等参数。
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The SpecEl-2000 Ellipsometer measures polarized light reflected from the surface of a substrate to determine the thickness and refractive index of the material as a function of wavelength. The SpecEl is controlled via a PC. Measure refractive index, absorbance and thickness with the touch of a button. |
The SpecEl houses an integrated light source, a spectrometer and two polarizers fixed to 70°. It also includes a PC with a 32-bit Windows operating system. The SpecEl can detect a single layer as thin as 0.1 nm and up to 5 µm thick. In addition, it can provide refractive indices to 0.005°.
SpecEl Software and "Recipe" Files
In SpecEl Software, you can configure and save experiment method files for one-step analysis. after creating a "recipe," you can select the recipe to execute the experiment.
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This screen shot from the SpecEl Software demonstrates the Psi and Delta values you can calculate for thickness, refractive index and absorbance. |
| Wavelength range: | 380-780 nm (standard) or 450-900 nm (optional) |
| Optical resolution: | 4.0 nm FWHM |
| Accuracy: | 0.1 nm thickness; 0.005% refractive index |
| Angle of incidence: | 70° |
| Film thickness: | 1-5000 nm for single transparent film |
| Spot size: | 2 mm x 4 mm (standard) or 200 µm x 400 µm (optional) |
| Sampling time: | 3-15 seconds (minimum) |
| Kinetic logging: | 3 seconds |
| Mechanical tolerance (height): | +/- 1.5 mm, angle +/- 1.0° |
| Number of layers: | Up to 32 layers |
| Reference: | Not applicable |
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