• 100g Load Capacity
• 100μm of Piezoelectric Travel in X and Y
• Closed Loop Control based on Strain Gauge feedback
• 25nm Positioning Resolution
• 150Hz Resonant Frequency
• 10mm Thick
• Ideal for precision scanning across Microscope Samples

With todays increasing trend towards automation, and the limited z-axis space available in microscopes, this new 2 axis low profile closed loop piezo scanning stage provides a unique solution to microscopy scanning applications. It offers a neat, compact solution to the microscopist who needs to scan small areas of his sample at high resolution.

The stage is readily mounted to most microscopes. The MicroScan measures just 10mm (0.39") high, and offers 100μm of piezoelectric controlled displacement in both X and Y directions. A closed loop control based on the feedback signal from Strain Gauge Displacement Sensors offers a positioning resolution of 25nm. A central aperture allows a microscope slide to be mounted and enables easy access for vision systems. The internal mechanism is flexure-based and intrinsically possesses very low friction and high stiffness, allowing the stage to be positioned with low settling time and high repeatability.

25nm Positioning Resolution
The drive voltage required for the full 100μm of travel is 75V with a resolution of 25nm, set by the feedback sensors. Thorlabs offers a closed loop control system that allows automated control of this nanopositioning application, featured within our "Piezo Control" section.