ATLEX-500-FBG main features：
◆ Soft corona preionization；
◆ HV-solid state pulser；
◆ Laser head volume < 3l；
◆ TMC (Total-Metal-Ceramic) Vessel；
◆ TMC (Total-Metal-Ceramic) Vessel；
◆ Integrated vacuum pump & halogen filter；
◆ Air Cooled / Optional Liquid Cooled, active thermal management；
◆ RS-485, RS232, USB and fiber optic Interface for system integration；
◆ Flushable optics holder；
◆ Energy stabilization mode；
◆ Dynamic fan speed controls；
◆ Meets European CE-standard；
◆ RoHS compliance；
Applications：
◆ Fibre Bragg grating writing；
ATLEX-500-FBG Specifications：
Gas Medium | ArF | KrF | Units |
Wavelength | 193 | 248 | nm |
High Voltage Switching Technique | Solid State Switch |
|
Max. Pulse Energy 1 | 10 | 15 | mJ |
Max. Average Power | 4.0 | 6.5 | W |
Spatial Coherence (Vertical Beam Direction) | >300 | >300 |
|
Max. Rep Rate | 500 | Hz |
Pulse Duration 2 | 5-8 | ns |
Beam Dimensions 2 (V x H) | 4x6 | mm |
Beam Divergence 2 (V x H) | 1x2 | mrad |
Energy Stability (standard deviation) | <3 | % |
Dimensions (LxWxH) click here for details | 540 x 470 x 370 | mm |
Weight | 60 | kg |
| Cooling | Cooling Air / Optional Liquid |
|
| Power requirement | 230 VAC / 6,3 A / 1 phase / 50-60 Hz |
|
All specifications are typical data and subject to change without notice due to product improvements.
1、Measured at low rep.rates; allow 10% reduction of output energy and power for laser equipped with stabilization mode.
2、Typical value, FWHM
